Semiconductor Equipment Manufacturing

Semiconductor CNC Machining

BatchMach Precision machines custom metal and engineering plastic components for semiconductor manufacturing, inspection, and test equipment. From equipment housings and mounting plates to wafer-handling components and test fixtures, we work to your drawings with attention to critical dimensions, surface finish, and specified cleaning requirements.

  • Tolerances as tight as ±0.005 mm on critical dimensions
  • Expert DFM analysis within 24 hours
  • Prototype and low-volume production
  • ISO 9001 certified quality management system
Semiconductor CNC Machining part

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19+

Years of Experience

250+

Machines & Testing Equipment

11,000 m²

Manufacturing Area

200+

Skilled Staff

ISO

9001 / 13485 / AS9100D

With years of experience in batch production and precision inspection of complex parts, we manufacture and inspect components to drawing requirements, covering critical dimensions, geometric tolerances, and material specifications. We provide complete measurement reports and material certificates to ensure delivered parts meet the specified requirements.

Trusted by
numerous companies

Why Choose BatchMach Precision for Semiconductor CNC Machining Services?

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Factory-Direct Communication

Work directly with the BatchMach Precision team from drawing review through machining and delivery. Equipment housings, mounting components, and test fixtures can be quoted together, making it easier to coordinate multiple custom parts within one project.

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Equipment for Complex Components

Our DMG MORI and Mazak five-axis machines, alongside horizontal machining and mill-turn capabilities, support multi-sided interfaces, internal cavities, and precision turned features. We select the process around your design, assembly requirements, and machining costs.

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Attention to Surface Condition and Cleanliness

Semiconductor equipment components may have specific limits for burrs, residual chips, and surface scratches. Before production, we review cleaning, finishing, and packaging requirements and confirm the scope of work and acceptance criteria.

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Materials Machined to Specified Grades

We machine aluminum, stainless steel, PEEK, and other metals and engineering plastics. Where static dissipation, insulation, or special contact requirements apply, we check material documentation against the specified grade before sourcing.

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Support for Equipment Development and Modifications

Prototype, test-part, and low-volume orders let you validate assemblies before purchasing additional quantities. When equipment interfaces or component designs change, we confirm drawing revisions and affected features before the next build.

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Inspection Against Your Drawings

ZEISS CONTURA and Hexagon CMMs, together with precision measuring tools, verify mounting-hole locations, mating dimensions, and datum relationships. Inspection reports are supplied according to order requirements to support incoming acceptance.

Our Semiconductor CNC Machining Capabilities

BatchMach Precision machines custom metal and engineering plastic components for semiconductor manufacturing, inspection, and test equipment. Our milling, turning, and five-axis capabilities support a range of geometries, with material, surface condition, and inspection requirements reviewed before production.

CNC Milling

CNC Milling

We machine equipment baseplates, mounting blocks, fixture nests, and housings with pockets, channels, and precision hole patterns. Three-axis, four-axis, and horizontal machining equipment supports different part layouts. For broad plates and thin sections, we plan support and cutting sequences to limit distortion, with attention to burr removal around intersecting features.

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CNC Turning

CNC Turning

Our Mazak and Takisawa CNC lathes produce sleeves, spacers, shafts, retaining rings, and cylindrical housings. Mating diameters, shoulders, grooves, and threads are machined to the drawing requirements. Where parts also need flats or cross-holes, mill-turn machining can combine operations and reduce repositioning.

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5-Axis CNC Machining

5-Axis CNC Machining

DMG MORI and Mazak five-axis equipment provides access to angled ports, contoured surfaces, and features on multiple faces. Related interfaces can be machined in fewer setups where geometry permits, helping maintain their alignment. We assess tool access and clamping locations around delicate sections and surfaces requiring protection.

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Prototypes and Production

Prototypes and Production

We support equipment development, assembly trials, and low-volume builds using customer-specified materials. Prototype parts can help verify fit, access, and fixture positioning before further production. Each build follows the confirmed drawing revision, with cleaning, finishing, and inspection requirements agreed for the project.

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Semiconductor CNC Machined Parts

BatchMach Precision produces custom metal and engineering plastic parts for semiconductor equipment manufacturers. We machine components from customer drawings, from straightforward mounting hardware to complex chamber parts and precision fixtures. The examples below illustrate part of our machining scope.

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Chamber Components and Vacuum Interfaces

We machine chamber housings, covers, flanges, and port adapters with cavities, sealing grooves, threads, and mounting holes. Milling and turning operations are planned around sealing-face flatness, groove dimensions, and interface alignment. Final surface condition, cleaning, and any leak-testing requirements are agreed for each project.

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Wafer-Handling Hardware

Machined end-effector bodies, support fingers, carrier adapters, and mounting blocks connect wafer-handling assemblies to their motion systems. We produce the specified contact profiles, mounting features, and edge radii, paying attention to thin-section support and surface protection. Material grade and any static-control requirements are confirmed before machining.

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Gas and Fluid Manifold Parts

We machine manifold blocks, valve mounting plates, fittings, and flow-system adapters with intersecting passages, threaded ports, and seal grooves. Process planning addresses drilling access and burr removal at internal intersections. Specified surface finish and cleanliness requirements are reviewed alongside dimensional inspection.

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Inspection Equipment Mounts

Camera brackets, detector mounts, optical holders, and positioning plates require accurately machined reference surfaces and mounting features. We mill locating pockets, slots, and hole patterns to the drawing, then verify specified heights, angles, and datum relationships for equipment assembly.

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Test Fixture and Socket Components

We machine test socket bodies, device nests, probe guide plates, and insulating spacers from specified engineering plastics or metals. Small pockets, fine hole patterns, and mounting interfaces are produced to the fixture design. Material selection distinguishes electrical insulation from static dissipation, with edge finish and dimensional stability considered during machining.

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Motion and Structural Components

CNC turning, milling, and mill-turn machining support shafts, sleeves, bearing housings, actuator mounts, and equipment baseplates. We coordinate diameters, shoulders, bores, and mounting faces to maintain the drawing-defined fits and alignment. Where finishing changes dimensions, machining allowances are established before production.

Materials for Semiconductor CNC Machining

BatchMach Precision machines metals and engineering plastics for semiconductor equipment parts. We review your drawings, material grades, and quantities to plan machining for components such as equipment housings, mounting hardware, handling parts, and test fixtures.

Aluminum

Aluminum is a practical choice for equipment baseplates, housings, chamber covers, and mounting brackets. Its light weight and machinability suit parts with multiple pockets and hole patterns. BatchMach Precision handles milling, drilling, and threading to your drawings, with allowances for anodizing where it affects mating dimensions.

Common Grades:

6061-T6Customer-Specified Alloys
CNC machined Aluminum part

Send Your Drawings and Material Requirements

Send your drawings and material requirements for machining feedback and a quote. Include any cleanliness, material certification, or packaging requirements with your inquiry.

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Surface Finishing for Semiconductor CNC Machined Parts

BatchMach Precision reviews finishing requirements alongside machining, with attention to coating thickness, mating dimensions, and masking locations. From equipment mounting hardware to fluid connections, we plan post-machining treatments around your drawings, operating environment, and final assembly requirements.

As Machined

As Machined surface finish sample

Suitable for mounting hardware, test fixtures, and engineering plastic parts that require no additional coating. We machine to the specified surface roughness and remove burrs, with particular attention to openings, grooves, and contact edges.

Anodizing — Type II

Anodizing — Type II surface finish sample

Aluminum housings, covers, and brackets can benefit from improved corrosion resistance. Grounding locations and close-fitting surfaces may require masking. Color and sealing requirements are confirmed for the intended operating environment.

Hardcoat Anodizing — Type III

Hardcoat Anodizing — Type III surface finish sample

For aluminum guides, locators, and motion components requiring wear resistance, hardcoat anodizing is an option. We account for coating growth before machining so finished bores and external dimensions maintain the required fit.

Stainless Steel Passivation

Stainless Steel Passivation surface finish sample

Passivation removes surface free iron from machined stainless steel flanges, fittings, and fasteners, helping maintain corrosion resistance. Machining marks and burrs must be addressed separately before treatment.

Electropolishing

Electropolishing surface finish sample

Stainless steel valve bodies, fittings, and flow passages may specify electropolishing for a smoother surface that supports subsequent cleaning. Because the process removes material, sealing edges, bore sizes, and final dimensions are reviewed beforehand.

Electroless Nickel Plating

Electroless Nickel Plating surface finish sample

Where the design permits a nickel coating, electroless nickel can provide wear and corrosion protection for equipment hardware. Plating thickness is factored into machined bores, shafts, and threads, with unplated areas identified on the drawing.

Laser Marking

Laser Marking surface finish sample

Part numbers, revisions, and batch identifiers can be added at specified locations to support receiving inspection and traceability. Markings are kept away from sealing faces, precision mating surfaces, and wafer-contact areas. Content and processing sequence are confirmed before production.

Include your finishing specifications with your RFQ and identify dimensions that must be met after treatment. For surfaces exposed to vacuum, process media, or wafer contact, also provide the relevant surface, cleaning, and packaging requirements.

Our CNC Machining Solutions for Semiconductor Equipment

BatchMach Precision supports semiconductor equipment development, assembly verification, and low-volume production with custom machined parts. For new equipment prototypes and revisions to existing mechanisms, we coordinate material, machining, finishing, and inspection requirements around customer drawings, helping projects move from initial fit checks to follow-on orders.

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Equipment Development and Prototype Fit Checks

Prototype chamber covers, interface adapters, and mounting blocks help engineers check mounting positions, internal clearances, and maintenance access. We identify dimensions that matter to the planned evaluation and flag features that complicate machining or increase cost. Changes to holes, interfaces, or profiles are incorporated into the approved drawing revision before the next machining run.

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Wafer Handling and Positioning Mechanisms

Support fingers, end-effector bodies, and locating blocks require accurate mounting features and carefully finished contact edges. BatchMach Precision machines profiles, support surfaces, and locating holes from the specified material, with attention to burrs and sharp edges. Slender sections receive appropriate support during machining to limit distortion, helping customers evaluate handling clearances and positioning.

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Chamber and Fluid Connection Interfaces

Chamber covers, flanges, and fluid connectors depend on correctly machined seal grooves, mating faces, and port locations. Our milling, turning, and five-axis capabilities support features in multiple orientations. We plan for cross-hole deburring and finishing allowances during machining, with sealing-surface roughness, cleaning requirements, and acceptance criteria confirmed before production to support subsequent assembly and leak testing.

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Test Fixtures and Design Updates

Device nests, test socket bodies, and probe guide plates must locate the device while leaving access for probes, wiring, and loading. We machine locating holes, pockets, and support features, including coordinated metal and plastic components for the same fixture. When device dimensions or test layouts change, we produce replacement parts from updated drawings and provide dimensional inspection reports as agreed in the order.

Quality Control for Semiconductor CNC Machining

BatchMach Precision checks semiconductor equipment components against your drawings, with particular attention to locating features, mating surfaces, and critical dimensions. Using ZEISS and Hexagon CMMs, we combine first-article verification, in-process checks, and final inspection to maintain consistency from prototypes through production. Inspection reports and material certificates are supplied according to your order requirements.

CMM Inspection of Critical Features

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CMM Inspection of Critical Features

BatchMach Precision uses ZEISS and Hexagon CMMs alongside precision measuring tools to inspect hole positions, flatness, parallelism, and mating dimensions. For mounting plates, equipment housings, and test fixtures, we verify critical features against drawing datums to support accurate positioning and assembly.

First-Article and Production Inspection

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First-Article and Production Inspection

First-article checks, in-process sampling, and final inspection help maintain consistency throughout production. We track critical dimensions and adjust tool offsets as needed, while checking machined surfaces, hole edges, and burr removal before shipment.

Inspection Reports and Material Documentation

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Inspection Reports and Material Documentation

We provide dimensional inspection reports, first-article inspection reports, and material certificates according to order requirements. Material grades, drawing revisions, and inspection results are checked against the order, giving customers clear records for incoming inspection and repeat production.

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Semiconductor CNC Machining FAQ

BatchMach Precision machines custom metal and engineering plastic parts from customer drawings, including chamber covers, flanges, wafer-handling hardware, mounting blocks, and test fixtures. These are examples of our machining scope. Send drawings for other custom components so we can review the material, geometry, and manufacturing requirements.

BatchMach Precision can achieve machining tolerances as tight as ±0.005 mm on critical dimensions. We use ZEISS CONTURA and Hexagon CMMs alongside precision measuring tools to inspect critical mating dimensions, hole locations, and datum relationships.

Yes. We support prototypes and low-volume orders for semiconductor equipment development, including multiple part numbers within the same project. You can verify fit, positioning, and motion clearances before ordering additional parts. Follow-on orders are produced to the confirmed drawing revision, material, and acceptance requirements.

Yes. BatchMach Precision CNC machines insulating and static-dissipative engineering plastics for custom test socket bodies, locating nests, insulating supports, and wafer-handling hardware. We machine holes, pockets, and mating surfaces from your specified material grade to meet the equipment’s assembly and functional requirements.

Provide your cleaning specification, residue limits, drying instructions, and packaging requirements with the RFQ. We review these alongside part geometry and finishing to confirm the processing and acceptance scope. For vacuum, process-gas, or wafer-contact applications, identify any required testing so the deliverables can be agreed before ordering.

Machining can be completed in as little as one day. BatchMach Precision supports urgent prototypes and small batches to help keep equipment fit checks, testing, and design updates moving.

BatchMach Precision’s quality management system is ISO 9001 certified. Material certificates, dimensional inspection reports, and batch traceability records can be provided as agreed in the order. Specify critical dimensions, sampling or 100% inspection requirements, and report formats before production so we can plan inspection and prepare the required documentation.

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